TG900MU

TG1300MU

Inlet flange

CF160

CF200

Volume flow rate

N2 (L/s)

900

1300

N2 (with protective 
screen) (L/s)

860

1230

H2 (L/s)

1050

1200

Max. compression ratio

N2 

1×108

H2 

6.0×104

Base pressure

(Pa/Torr)

< 1×10-8/< 7.5×10-11

Max. throughput※1 

N2(sccm)

3000

Startup time (min)

4-5

Shutdown time (min)

4-5

Max. backing pressure

(Pa/Torr)

500/3.8

Recommended backing vacuum 

pump (L/min)

≧250

Weight (kg)

42

Controller

TC010MA